반도체 자동화 설비
정밀하고 유연한 자동화, 반도체 제조의 미래를 이끕니다.
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Wafer Measuring system
| Dimension |
2819 (W) X 2210(D) X 2530(H) mm |
| Cassette Type |
Wafer Cassette |
| Wafer size |
300mm Wafer |
| Cassette Stage |
1–Cassette Stage, 2–Cassette Stage |
| Compliance |
SEMI Standard |
| ROBOT |
YASKAWA(Dual Arm Robot) or TAZMO Robot |
| Aligner |
Pre-Aligners for 300mm Wafer |
| Weight |
2500kg |
| OCR |
OCR System |
| FRAME / COVER |
Material : SS41, Color : WH009 |
| Monitor / Computer |
17” TFT-LCD Touch Monitor 4ea, System Control PC 3ea |
| Operation |
Window based industrial PC(Window 11) |
| Safety |
Cover Interlock |
| Power |
AC 220V 50/60Hz 25A |
| Utility |
Vacuum -80KpaØ8 2EA ,CDA 0.5Mpa Ø8 3EA |
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Sorter
| Dimension |
1740 (W) X 1447(D) X 2180(H) mm |
| Cassette Type |
Wafer Cassette |
| Wafer size |
300mm Wafer |
| Cassette Stage |
2–Cassette Stage |
| Compliance |
SEMI Standard |
| ROBOT |
YASKAWA(Dual Arm Robot) or TAZMO Robot |
| Aligner |
Pre-Aligners for 300mm Wafer |
| Weight |
600kg |
| OCR |
OCR System |
| FRAME / COVER |
Material : SS41, Color : WH009 |
| Monitor / Computer |
17” TFT-LCD Touch Monitor 4ea, System Control PC 3ea |
| Operation |
Window based industrial PC(Window 11) |
| Safety |
Cover Interlock |
| Power |
AC 220V 50/60Hz 25A |
| Utility |
Vacuum -80KpaØ8 2EA ,CDA 0.5Mpa Ø8 3EA |
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EFEM
| Dimension |
1740 (W) X 1447(D) X 2180(H) mm |
| Cassette Type |
Wafer Cassette |
| Wafer size |
300mm Wafer |
| Cassette Stage |
1–Cassette Stage, 2–Cassette Stage |
| Compliance |
SEMI Standard |
| ROBOT |
YASKAWA(Dual Arm Robot) or TAZMO Robot |
| Aligner |
Pre-Aligners for 300mm Wafer |
| Weight |
600kg |
| OCR |
OCR System |
| FRAME / COVER |
Material : SS41, Color : WH009 |
| Monitor / Computer |
17” TFT-LCD Touch Monitor 4ea, System Control PC 3ea |
| Operation |
Window based industrial PC(Window 11) |
| Safety |
Cover Interlock |
| Power |
AC 220V 50/60Hz 25A |
| Utility |
Vacuum -80KpaØ8 2EA ,CDA 0.5Mpa Ø8 3EA |
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Vacuum Stage
| Dimension |
440 (W) X 490(D) X 120(H) mm |
| Wafer size |
300mm Wafer, Ring Wafer |
| Compliance |
SEMI Standard |
| Weight |
18kg |
| FRAME / COVER |
Material : SS41 |
| Warpage |
+- 2.5mm |
| Utility |
Vacuum -80KpaØ8 1EA ,CDA 0.5Mpa Ø8 1EA |
