배관시스템
안정된 공급, 깨끗한 흐름 — 설비의 기본을 설계하다.
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Auto scanning system
| Dimension |
1500(W) X 1900(D) X 1980(H) mm |
| Cassette Type |
Wafer Cassette |
| Wafer size |
200mm, 300mm Wafer |
| Cassette Stage |
1–Cassette Stage, 2–Cassette Stage |
| Compliance |
SEMI Standard |
| ROBOT |
TAZMO(Single Arm Robot) |
| Aligner |
Pre-Aligners for 300mm Wafer |
| Weight |
1400kg |
| BCR |
BCR System |
| FRAME / COVER |
Material : SS41, Color : WH009 |
| Monitor / Computer |
17” TFT-LCD Touch Monitor 4ea, System Control PC 3ea |
| Operation |
Window based industrial PC(Window 11) |
| Safety |
Cover Interlock |
| Power |
AC 220V 50/60Hz 25A |
| Utility |
Vacuum -80KpaØ8 2EA ,CDA 0.5Mpa Ø8 3EA |
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GAS box
| Dimension |
440 (W) X 490(D) X 120(H) mm |
| Compliance |
SEMI Standard |
| Weight |
18kg |
